Super Hard Film PVD Vacuum Coating Machine

High Deposition Rate
Double-layer Water-cooled Chamber
Automatic Process Recipe Storage

Introduction

Integrates filtered multi-arc ion and unbalanced magnetron sputtering technology, specially prepares super-hard wear-resistant, high-temperature resistant and corrosion-resistant coatings for cutting tools and precision molds to extend workpiece service life.

Core Technology

■ Coating hardness is up to 1800~3500HV, with high wear resistance and corrosion resistance

■ Planetary revolution-rotation workpiece holder, excellent wrapping for special-shaped workpieces

■ Multi-target configuration, capable of coating multi-layer composite gradient films

■ Closed-loop temperature control system, precise coating temperature control

Core Advantages

■ Filtered droplet removal technology, no droplets in coating, fine surface, greatly improved wear resistance

■ Dual magnetic field enhanced ion etching, strong film adhesion, no peeling

■ High-temperature resistant coating up to 1100℃, suitable for high-speed dry cutting

■ Compatible with high-speed steel, cemented carbide, mold steel, aluminum alloy, ceramics, covering all industrial scenarios

Basic Configuration

Model	CCZK-700-HT	CCZK-1000-HT
Chamber Size	D700mm*H700mm	D1000mm*H1000mm
Power Load	140KW	170KW
Landing Area	L4460mmW4340mmH2290mm	L5200mmW4800mmH2700mm
Coating Films	TiN, CrN, AlTiN, AlCrN, TiSiN, AlCrSiN; Hardness 1800~3500HV, maximum heat resistance 1100℃
Vacuum System	Diffusion pump/Turbo molecular pump +Booster pump + Rotary vane pump+Holding pump(cryogenic pump and polycold is optional)
Rotation System	Planetary rotation and revolution 6/8/10/12/16 axis

Ultimate Vacuum	5*10^-4Pa (Clean and empty chamber)
Coating System	BTA^® Bending tube filter arc cathode IET^® Etching source Distributed MFC gas path Anode layer linear ion source


Power Supply	Pulsed ARC power / Pulsed Bias power /Plasma power/HIPIMS power/IET^® power
Operation System	Full automatic(IPC/PLC)+Remotely operation+Alarm System (OPC-UA Link protocol available)

Remark	The specific configuration size can be designed according to customer's coating product requirements

Application

Widely used in cutting tools, stamping dies, aerospace parts, medical devices, and wear-resistant mechanical components, it can form an ultra-hard film layer with dense and uniform properties.