DLC Diamond-Like Carbon PVD Coating Machine

PVD+PECVD DLC Coating
Low-temperature Deposition Technology
Multi-target Magnetron Sputtering Source

Introduction

Adopts unbalanced closed magnetron sputtering/FCVA filtered cathode arc technology, deposits hydrogen-containing/hydrogen-free DLC coating film at low temperature, with low friction, high wear resistance and self-lubricating characteristics

Core Technology

■ Independent DLC process, small film stress, no cracking or peeling

■ 3D removable rack, easy clamping, suitable for various workpieces

■ Fully automatic operating system, one-key call of process parameters

■ Compatible with various DLC film systems to meet different working conditions

Core Advantages

■ Friction coefficient ≤0.15, excellent self-lubricity, no additional lubrication required

■ Hydrogen-free ta-C coating hardness up to 63GPa, excellent wear resistance

■ Low temperature (100~200℃) deposition, suitable for heat-sensitive substrates

■ Dense film, acid and alkali resistant, corrosion resistant, salt spray resistant

Basic Configuration

Model	CCZK-1012-DLC	CCZK-1416-DLC
Chamber Size	D1000mm*H1200mm	D1400mm*H1600mm
Power Load	140KW	170KW
Landing Area	L5400mmW5200mmH2900mm	L6155mmW5050mmH3210mm
Coating Colors	Black, Dark Gray, Matte Black,Rainbow
Coating Films	Hydrogen-containing DLC, hydrogen-free ta-C, W-DLC, GLC, WC/C; Hardness 1500HV~63GPa, friction coefficient ≤0.15
Vacuum System	Diffusion pump/Turbo molecular pump +Booster pump + Rotary vane pump+Holding pump(cryogenic pump and polycold is optional)
Ultimate Vacuum	5* 10^-4Pa (Clean and empty chamber)
Rotation System	Planetary rotation and revolution 6/8/10/12/16 axis

Coating System	CKB^® Planar Sputtering Cathode / CKB^® Cylinder Rod Sputtering Cathode / IET^® Etching / Distributed MFC Gas Path /HIPIMS Sputtering


Power Supply	Pulsed DC Sputtering power / Bipolar Sputtering power / RF Sputtering power / Pulsed Bias power / HIPIMS power / IET^® power
Operation System	Full automatic(IPC/PLC)+Remotely operation+Alarm system (OPC-UA Link protocol available)

Remark	The specific configuration size can be designed according to customer's coating product requirements

Application

Widely used in engine pistons, sliding seals, non-ferrous metal cutting tools, medical devices, precision mobile phone components, and high-end decorative parts, and can form a dense film.