Magnetron Sputtering PVD Vacuum Coating Machine

Indirectly Cooled Target Core
Unbalanced Closed Magnetic Field
Planar/Cylindrical Cathode Optional

Introduction

Adopts planar/rotary magnetron sputtering technology, can deposit dense and uniform metal and compound films, suitable for various substrates and scenarios

Core Technology

■ Optional planar/rotary targets, strong adaptability

■ Fully automatic PLC control, easy operation

■ Capable of single/multi-layer coating, pure film quality

■ Suitable for large/small and special-shaped workpieces

Core Advantages

■ Dense and uniform film with strong adhesion

■ Stable process with good repeatability

■ Low-temperature coating, no damage to heat-sensitive substrates

■ High target utilization, low maintenance cost

Basic Configuration

Model	CCZK-700-SF	CCZK-1012-SF	CCZK-1416-SF	CCZK-1618-SF	CCZK-1820-SF
Chamber Size	D700mm*H700mm	D1000mm*H1200mm	D1400mm*H1600mm	D1600mm*H1800mm	D1800mm*H2000mm
Power Load	58KW	75KW	175KW	230KW	255KW
Landing Area	L4200mmW4200mmH2300mm	L5400mmW5200mmH2900mm	L6155mmW5050mmH3210mm	L6500mmW4750mmH3200mm	L7800mmW5200mmH2600mm
Coating Colors	Golden, Silver, Gun Black, Rose Gold, Blue, Gray, Transparent
Coating Films	Pure metal film, alloy film, compound film; Hardness 500~3000HV, dense and wear-resistant
Vacuum System	Diffusion pump/Turbo molecular pump +Booster pump + Rotary vane pump+Holding pump(cryogenic pump and polycold is optional)
Ultimate Vacuum	5* 10^-4Pa (Clean and empty chamber)
Rotation System	Planetary rotation and revolution 6/8/10/12/16 axis

Coating System	CKB^® Planar Sputtering Cathode / CKB^® Cylinder Rod Sputtering Cathode / IET^® Etching / Distributed MFC Gas Path /HIPIMS Sputtering


Power Supply	Pulsed DC Sputtering power / Bipolar Sputtering power / RF Sputtering power / Pulsed Bias power / HIPIMS power / IET^® power
Operation System	Full automatic(IPC/PLC)+Remotely operation+Alarm system (OPC-UA Link protocol available)

Remark	The specific configuration size can be designed according to customer's coating product requirements

Application

Widely used in hardware decorative parts, home appliance glass, automotive parts, 3C digital products, optical lenses, glass cosmetic bottles, semiconductor components, precision instrument components, and high-end craft ornaments, it can present rich colors and form a uniform and dense film layer.