Optical Precision PVD Vacuum Coating Machine

Multi-layer Film System Programming
Controllable Electron Gun Beam Current
Quartz Crystal Film Thickness Monitoring

Introduction

Adopts electron beam evaporation/magnetron sputtering composite technology with ion source assisted deposition, specially designed for multi-layer precision optical films to achieve high uniformity, high purity and high precision optical film deposition.

Core Technology

■ Dual-mode film thickness monitoring (crystal/optical), fully automatic closed-loop control

■ Vertical integrated structure, small footprint and easy operation

■ Ion source-assisted deposition, dense and firm film

■ Manual/full-automatic dual mode, for both R&D and mass production

Core Advantages

■ Imported film thickness monitoring system, thickness control accuracy ≤±1%, excellent film system repeatability

■ Pre-cleaning with ion source, significantly improved film-substrate adhesion

■ High vacuum environment, no impurities in film, 100% optical performance compliance rate

■ Compatible with various coating processes, strong process adaptability

Basic Configuration

Model	CCZK-1350-OGS	CCZK-1600-OGS	CCZK-2050-OGS
Chamber Size	D1350mm*H1350mm	D1600mm*H1500mm	D2050mm*H1600mm
Power Load	67KW	86KW	105KW
Landing Area	L5700mmW4900mmH3050mm	L6800mmW5800mmH6780mm	L8300mmW7000mmH4200mm
Coating Films	AR anti-reflection film, AF anti-fingerprint film, high-reflection film, filter film, BBAR broadband anti-reflection film; AF film hardness ≥6H, optical film is dense and pinhole-free
Vacuum System	Diffusion pump/Turbo molecular pump +Booster pump + Rotary vane pump+Holding pump(cryogenic pump and polycold is optional)
Ultimate System	5*10^-4Pa(Clean and empty chamber)
Rotation System	Planetary rotation and revolution 6/8/10/12/16 axis

Coating System	E-type Electric Beam Hall Ion Source Distributed MFC Gas Path CTM^® Quartz Crystal Thickness Monitor


Power Supply	Electric beam power supply Plasma power supply
Operation System	Full automatic(IPC/PLC)+Remotely operation+Alarm system (OPC-UA Link protocol available)

Remark	The specific configuration size can be designed according to customer's coating product requirements

Application

Widely used in mobile phone camera lenses, optical lenses, eyeglass lenses, automotive display glass, VR/AR optical components, and precision filters, and can form a precise and uniform film layer with rich effects.